AS if illyria would be history come on some stupid tech damaged her and it be know trouble for dark willow.
when giles said willow had reached the maximum attianable power. she could sense every emotion from every being on the planet, she was connected to everything. as they point out in episode 3 season 7 every object or person in the world is connected. Willow was conected to everything at the end season 6, which of course is why no supernatural force on earth could have defeated her. those powerful to enough to stop her. can't exist in this dimension. she is the ultimate being that can exist on earth in the buffy verse. now if you could get her on another plane or dimension you have a shot. i think only the first would have had a chance to take her down, because at this point, shes the juggernaunt, her only real weakness is the fragilily of her mind, becuase shes channel both dark and light magic at the same time and feeling everyone emotions.And her emotion give her the oppounity to fight any battle with any creature on earth becasue I'm sorry but Willow has proven to be on par with a goddess. She went to battle with a god, raised the dead twice , almost destroyed the world, and single handedly rewrote a powerful and ancient ritual to combat evil and that's not lisying all of her feats.On the show Illyria, when she was at full power in Fred's shell, powers included super human strength far more greater than most if any character on both series and LIMITED time shifting abilities. All things I'm sure Willow can achieve. Witchcraft is connected to nature and the earth and the earth is pretty much Willow's weapon. She can draw on it's very energy and essence to perform powerful magic. Remeber in her prime, Illyria needed an army to destroy the earth Willow didn't.