I don't think so. Regular Willow was able to affect Glory, albeit not enough to defeat her. I think Dark Willow would give Glory a run for her godly money.
I'd say Illyria, Dark Willow, and then Glory. But then again, I've probably never given Glory enough credit either. She's not my favorite villian, and IMO she probably did a lot of exaggerating as to what she was and wasn't capable of.
Dark Willow, however, is capable of flying, flaying, and shooting magical laser cannons. Glory is just unhumanly strong and annoying. She has no other real power besides being abnormally strong, and she reverts back to whats his uninteresting face all the time. I think Dark Willow could hold her own against Glory until she changes, and then she wouldn't hesitate to kill Ben and effectively end Glory forever.
Illyria, on the other hand, outshines both of them in every way. Glory's strength doesn't even compare, and Dark Willow can't easily fly away or attack if Illyria chooses to use her time-slowing skills. Aaannd there's got to be a better word for that than "time-slowing". Give me a break, I'm going on 36 hours now with only about 3 hours of sleep total (and unfortunately not all at once).